PENGARUH TEMPERATUR ANNEALING TERHADAP SIFAT OPTIK LAPISAN TIPIS TIN DIOXIDE (SnO2) - Tari Rafika Rahman (Jurusan Fisika FMIPA Universitas Negeri Surabaya, 2017)
Abstrak Penelitian ini dilaksanakan untuk mendiskripsikan pengaruh temperatur annealing terhadap sifat optik lapisan tipis SnO2 . Deposisi lapisan tipis dilakukan dengan teknik spin coating pada substrat kaca dengan 3 variasi kecepatan putar 1500 rpm, 2000 rpm, 2500 rpm, dan temperatur annealing 100°C, 150°C dan 200°C. Pengukuran ketebalan lapisan tipis SnO2 dilakukan menggunakan Ellipsometer SpecEI-2000, dimana setiap bertambahnya temperatur annealing, ketebalan lapisan tipis akan semakin berkurang (semakin tipis). Yang memiliki rentang ketebalan 83.8 nm dan 79.5 nm. Nilai indeks bias pada temperatur annealing 100°C, 150°C dan 200°C kecepatan putar 2000 rpm secara berurutan adalah 1.90, 1.80 dan 1.86. Uji Spektrofotometri UV-Vis menunjukkan nilai transmitansi berbanding terbalik dengan nilai absorbsi. Transmitansi maksimal 88% pada temperatur annealing 150°C panjang gelombang 300 nm. Struktur permukaan lapisan tipis dari hasil SEM menunjukkan bahwa semakin tinggi temperatur pemanasan terjadi pengumpalan atau aglomerasi dan beberapa kekosongan lapisan SnO2 akibat penguapan. Karena semakin bertambanya temperatur annealing menyebabkan lapisan tipis SnO2 semakin kering dan cepat mengelupas. Kata Kunci : Temperatur Annealing , SnO2, sifat optik Abstract Research carried out is this “skripsi” is to know and and analyzed the effect of temperatur annealing for optical properties of SnO2 thin film. SnO2 thin films were deposited on glass substrates by using Spin Coating technique with rotation speed 1500 rpm, 2000 rpm and 2500 rpm on heating temperature 100°C, 150°C and 200°C. Measurement of thickness by Ellipsometer SpecEI-200 were analyzed that increasing heating temperature the thickness of thin films are decreasing. Namely at annealing temperature 100 ° C - 200 ° C at a rotational speed of 1500 rpm 83.8, 82.5, 80.9, at 2000 rpm 83.6, 83.3, 80.0 nm rotational speed and at 2500 rpm rotational density 83.3, 82.4, 79.5 nm. Refractive index , at annealing temperature 100°C, 150°C and 200°C is 1.90,1.80, 1.86 . UV-Vis spectrophotometry test showed that the value of transmittance is inversely proportional to its absorbsity value. With maximum transmittance of 88% at annealing temperature of 150 °C at 300 nm wavelength. Surface structural of thin film showed increasing annealing temperature were clumping or agglomeration and vacuum of SnO2 coating due to evaporation when heated. Due to the increasing temperature of the heating will cause the thin layer of SnO2 will be dry and quickly peel. Keywords : Annealing Temperature, SnO2, Optical Properties