JURNAL Al-AZHAR INDONESIA SERI SAINS DAN TEKNOLOGI
Vol 2, No 1 (2013)

Annealing Effects on Silica Based Optical Waveguides Fabricated by Electron Beam Irradiation

Ary Syahriar (Unknown)

Article Info

Publish Date
19 Jun 2014

Abstract

Defect in channel waveguide fabricated by e-beam irradiation of PECVD silica-on-silicon films are analyzed by characterizing the propagation constant change due to high temperature annealing. The changes of normalized compaction are also described and the theoretical prediction on the variation of normalized compaction with anneal temperature in isochronal annealing is also provided.

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Journal Info
JURNAL Al-AZHAR INDONESIA SERI SAINS DAN TEKNOLOGI
Website

Abbrev

SST

Publisher

Universitas Al Azhar Indonesia

Subject

Biochemistry, Genetics & Molecular Biology Computer Science & IT Electrical & Electronics Engineering Industrial & Manufacturing Engineering Public Health

Description

Jurnal AL-AZHAR INDONESIA SERI SAINS DAN TEKNOLOGI terbit 2 kali dalam setahun yaitu pada bulan Maret dan September adalah jurna; ilmiah yang mempublikasikan artikel hasil penelitan ilmiah dan ide-ide di bidang sains dan teknologi. Jurnal ini berfokus pada bidang teknik industri, teknik elektro, ...