Study on the Linearly Range of S-Shaped MEMS Planar Micro-spring

Guozhong Li (Beijing Institute of Technology)
Li Sui (Beijing Institute of Technology)
Gengchen Shi (Beijing Institute of Technology)

Indonesian Journal of Electrical Engineering and Computer Science
Vol 10, No 6: October 2012

For the lack of formula of linear range for S-shaped MEMS planar micro-spring, this paper establishes physical and mathematical model and analysis the material stress-strain angle. The formula is deduced by calculating the strain and rotation of the basic unit of micro-spring tension. Compared with the results of the tests on micro-spring which produced by UV-LIGA process, the formula results is in about 10% higher, providing theoretical guidance for the design and application of S-shaped MEMS planar micro-spring in engineering practice. DOI: http://dx.doi.org/10.11591/telkomnika.v10i6.1427