Makara Journal of Technology
Vol. 6, No. 1

Making Alloys (TI1 - xAlx) N using plasma CVD technique from AlCl3 Powder, H2 and N2 Gas ,with solvent TiCl4

Moto, Keba (Unknown)

Article Info

Publish Date
01 Apr 2002

Abstract

The substitution of Ti atoms by Al atoms in TiN lattice sites to form (Ti1-xAlx)N is clearly demonstrated by the coatings which were deposited on steel substrate and using plasma CVD technique. The presence of Al atoms in TiN lattice site is shown by means of XRD and EDX techniques: lattice parameters decreasing of TiN as the fraction of Al increases (XRD) and precipitation of hexagonal AlN phase (XRD) as the fraction of Al exceeding 0.8 (EDX). The hardness of these coating are just around 30 GPa, which is beyond the values reported in literatures.

Copyrights © 2002




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Journal Info
Makara Journal of Technology
Website

Abbrev

publication:mjt

Publisher

Universitas Indonesia

Subject

Chemical Engineering, Chemistry & Bioengineering Civil Engineering, Building, Construction & Architecture Electrical & Electronics Engineering Engineering Materials Science & Nanotechnology Mechanical Engineering

Description

MAKARA Journal of Technology is a peer-reviewed multidisciplinary journal committed to the advancement of scholarly knowledge and research findings of the several branches of Engineering and Technology. The Journal publishes new results, original articles, reviews, and research notes whose content ...