Makara Journal of Technology
Vol. 18, No. 2

Adjustable Resonance Frequency of RF-MEMS Capacitor by Using Comb- Drive Actuators: A Design Approaches

Tamsir, Agus Santoso (Unknown)
Wijaya, Sandy Tannu (Unknown)
Majlis, Dato’ Burhanuddin Yeop (Unknown)

Article Info

Publish Date
02 Aug 2014

Abstract

The needs of smaller size RF varactor is a must today, and MEMS comes to be the potential one. In this paper we proposed an adjustable resonance RF-MEMS varactor by using comb-drive actuators placing in each side of the square movable plate. In our preliminary simulation, we found that the device can work properly but some constraints comes such as the dominancies of harmonic resonance frequencies that influences into the nominal capacitances. Therefore for the next step of development we have to find out the window of the structural dimension for a certain spans and a certain operating frequencies.

Copyrights © 2014




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Journal Info
Makara Journal of Technology
Website

Abbrev

publication:mjt

Publisher

Universitas Indonesia

Subject

Chemical Engineering, Chemistry & Bioengineering Civil Engineering, Building, Construction & Architecture Electrical & Electronics Engineering Engineering Materials Science & Nanotechnology Mechanical Engineering

Description

MAKARA Journal of Technology is a peer-reviewed multidisciplinary journal committed to the advancement of scholarly knowledge and research findings of the several branches of Engineering and Technology. The Journal publishes new results, original articles, reviews, and research notes whose content ...