Bulletin of Electrical Engineering and Informatics
Vol 4, No 4: December 2015

Characterization of Sandia Capacitive Comb-finger MEMS Accelerometers

Joshi, Aaditi ( Arizona State University)
Redkar, Sangram ( Arizona State University)
Sugar, Thomas ( Arizona State University)

Article Info

Publish Date
01 Dec 2015

Abstract

This paper discusses various methods for testing the performance of MEMS capacitive comb-finger accelerometers manufactured by Sandia National Laboratories. The use of Capacitive MEMS devices requires complex circuits for measurement of capacitance and the Sandia MEMS accelerometer’s capacitance changes in a very small femto-farad (fF) range. The performance of accelerometer is tested using Analog Devices AD7747 sigma-delta capacitance to digital converter. The response of a MEMS capacitive accelerometer to various tests is useful for testing and characterization and investigate it’s suitability for various applications.

Copyrights © 2015




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Journal Info
Bulletin of Electrical Engineering and Informatics
Website

Abbrev

EEI

Publisher

Institute of Advanced Engineering and Science

Subject

Computer Science & IT Electrical & Electronics Engineering Engineering

Description

Bulletin of Electrical Engineering and Informatics ISSN: 2302-9285 is open to submission from scholars and experts in the wide areas of electrical, electronics, instrumentation, control, telecommunication, computer engineering, computer science, information technology and informatics from the global ...