Article Per Year (5 Year)
p-Index From 2021 - 2026
0
P-Index
This Author published in this journals
All Journal International Journal of Electrical and Computer Engineering
R. Anil Kumar
K.L University Vaddeswaram
Computer Science & IT Electrical & Electronics Engineering

Published : 1 Documents Claim Missing Document
Claim Missing Document
Check
Articles

Found 1 Documents
Search

 1 
Modeling and Simulation of Triple Coupled Cantilever Sensor for Mass Sensing Applications Nalluri Siddaiah; D.V. Rama Koti Reddy; Y. Bhavani Sankar; R. Anil Kumar; Hossein Pakdast
International Journal of Electrical and Computer Engineering (IJECE) Vol 5, No 3: June 2015
Publisher : Institute of Advanced Engineering and Science

Show Abstract | Download Original | Original Source | Check in Google Scholar | Full PDF (517.241 KB) | DOI: 10.11591/ijece.v5i3.pp403-408

Abstract

Cantilever sensors have been the growing attention in last decades and their use as a mass detector. This work presents design, modeling and analysis of Triple coupled cantilever(TCC) sensor using MEMS simulation software Comsol Multiphysics with critical  dimensions of 100μm length,20μm width and 2μm thickness. Simulations were performed based on finite element modeling techniques, where different resonant frequencies were observed for different modes of operation. It is also observed that the resonant frequency of the sensor decreases as some mass is applied on one particular cantilever. The various parameters greatly affecting the performance of TCC such as resonant frequency, dimensions, material and pressure or force applied on it.we also observed that while adding some mass on any one lateral cantilever, the resonant frequency of that respective mode reduced.
Co-Authors D.V. Rama Koti Reddy Hossein Pakdast Nalluri Siddaiah Y. Bhavani Sankar