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All Journal International Journal of Electrical and Computer Engineering International Journal of Reconfigurable and Embedded Systems (IJRES)
Thanatchai Kulworawanichpong
Suranaree University of Technology
Computer Science & IT Economics, Econometrics & Finance Electrical & Electronics Engineering

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Metal-embedded SU-8 Slab Techniques for Low-resistance Micromachined Inductors Manot Mapato; Prapong Klysuban; Thanatchai Kulworawanichpong; Nimit Chomnawang
International Journal of Electrical and Computer Engineering (IJECE) Vol 8, No 6: December 2018
Publisher : Institute of Advanced Engineering and Science

Show Abstract | Download Original | Original Source | Check in Google Scholar | Full PDF (54.054 KB) | DOI: 10.11591/ijece.v8i6.pp4772-4780

Abstract

This work presents a new fabrication technique for micro power inductors by using metal-embedded SU-8 slab molding techniques. The proposed technique uses X-ray lithography to fabricate high-aspect-ratio LIGA-like microstructures in form of embedded structures in the SU-8 slab. This process was applied to fabricate an inductor’s windings with an aspect ratio of 10, which can provide very low resistance but still preserve a small form factor and low profile. Inductors were designed as pot-core structures with overall heights of 370 μm and embedded with 250-μm-thick windings. From the advantage of metal embedded SU-8 slab techniques, 8 μm-thick permalloy core could be fabricated by electroplating around the winding in a single step that could help simplify the process. Four types of inductors were fabricated with 3, 5, 10, and 16 turns in the area of 1.8 to 9.5 mm2. The measured inductance was in the range of 70 nH to 1.3 μH at 1 MHz and DC resistance of 30–336 mΩ for 3–16 turns, respectively. The DC resistance of fabricated inductor was low, as expected, and showed good result compared with the results in literature.
Metal-Embedded SU-8 Slab Techniques for Low-Resistance Micromachined Inductors Manot Mapato; Prapong Klysuban; Thanatchai Kulworawanichpong; Nimit Chomnawang
International Journal of Reconfigurable and Embedded Systems (IJRES) Vol 6, No 2: July 2017
Publisher : Institute of Advanced Engineering and Science

Show Abstract | Download Original | Original Source | Check in Google Scholar | Full PDF (538.018 KB) | DOI: 10.11591/ijres.v6.i2.pp88-96

Abstract

This work presents new fabrication technique for micro power-inductors by using metal-embedded SU-8 slab techniques. This techniques used X-ray lithography to fabricate high aspect-ratio LIGA-like micro-structures in form of embedded structure in SU-8 slab and applied for inductor’s winding fabrication with aspect-ratio of 10. Thishigh-aspect ratiostructure can provide very low resistance winding but preserve small form factor and low profile. Inductors were designed as pot-core structures with8 μm-thick permalloy core and 250 μm-thick copper winding. 4-types of inductors were fabricated including 3, 5, 10 and 16 turns in the area of 1.8 mm2 to 9.5 mm2. All inductors have overall heights of 370 μm, measured inductance value in a range of 70 nH to 1.3 μH at 1 MHz and DC resistance value of 30 mΩ to 336 mΩ for 3 turns to 16 turns respectively. From this result, high aspect-ratio inductors show good results including low-resistance, high inductance, and a small form factor as expected. 
Co-Authors Manot Mapato Nimit Chomnawang Nimit Chomnawang Prapong Klysuban