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Svetlana Koshevaya
Universidad Autonóma del Estado de Morelos (UAEM)
Computer Science & IT Electrical & Electronics Engineering

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Displacement mechanical amplifiers designed on poly-silicon Ramon Cabello-Ruiz; Margarita Tecpoyotl-Torres; Alfonso Torres-Jacome; Gerardo Vera-Dimas; Svetlana Koshevaya; Pedro Vargas-Chable
International Journal of Electrical and Computer Engineering (IJECE) Vol 9, No 2: April 2019
Publisher : Institute of Advanced Engineering and Science

Show Abstract | Download Original | Original Source | Check in Google Scholar | Full PDF (469.253 KB) | DOI: 10.11591/ijece.v9i2.pp894-901

Abstract

Using Poly-Silicon, the implementation of novel Displacement-amplifying Compliant Mechanisms (DaCM), in two geometries of accelerometers, allows for remarkable improvements in their operation frequency and displacement sensitivity, with different proportions. Similar DaCM´s geometries were previously implemented by us with Silicon. In all mentioned cases, the geometries of DaCM´s are adjusted in order to use them with Conventional Capacitive Accelerometer (CCA) and Capacitive Accelerometer with Extended Beams (CAEB), which operate in-plane mode, (y-axis). It should be noted that CAEB shows improvements (95.33%) in displacement sensitivity compared to ACC. Simulations results, carried out using Ansys Workbench software, validate the system’s performance designed with Poly-Silicon. Finally, a comparison with the similar systems, previously designed with Silicon, is also carried out.
Co-Authors Alfonso Torres-Jacome Gerardo Vera-Dimas Margarita Tecpoyotl-Torres Pedro Vargas-Chable Ramon Cabello-Ruiz