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Effect of Experimental Factors in the Growth of Carbon Nanotubes from CO2 by MPECVD Process Fritzie Hannah Baldovino; Joseph L. Auresenia
ASEAN Journal of Chemical Engineering Vol 14, No 1 (2014)
Publisher : Department of Chemical Engineering, Universitas Gadjah Mada

Show Abstract | Download Original | Original Source | Check in Google Scholar | Full PDF (695.24 KB) | DOI: 10.22146/ajche.49714

Abstract

The effects of experimental factors such as type of catalyst (nickel and cobalt) and substrate (iron and silicon wafer) in the growth of carbon nanotubes (CNT) from CO2 by microwave plasma-enhanced chemical vapor deposition (MPECVD) was systematically studied. Catalyst size and CNT grown were examined using scanning electron microscope (SEM). Furthermore, gas chromatography (GC) was used to analyze the effluent gas. Moreover, suitable type of catalyst and substrate were determined in terms on the amount of CNT grown, purity, and carbon conversion.Keywords : carbon nanotubes, chemical vapor deposition, nanotechnology