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Esmar Budi
Jurusan Fisika, FMIPA Universitas Negeri Jakarta, Jl Pemuda No. 10 Rawamangun, 13220
Control & Systems Engineering Mathematics

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X-ray Photoelectron Spectroscopy (XPS) Analysis of Undoped ZnO and ZnO:Er Thin Films Iwan Sugihartono; Esmar Budi; Agus Setyo Budi
Jurnal ILMU DASAR Vol 16 No 1 (2015)
Publisher : Fakultas Matematika dan Ilmu Pengetahuan Alam Universitas Jember

Show Abstract | Download Original | Original Source | Check in Google Scholar | Full PDF (307.446 KB) | DOI: 10.19184/jid.v16i1.1052

Abstract

Undoped ZnO and ZnO:Er  thin films were deposited on p-type Si substrates by ultrasonic spray pyrolisis (USP). Undoped and ZnO:Er thin films have been analyzed by using X-ray Photoelectron Spectroscopy (XPS). The results show that the XPS spectrum has two Er peak at ∼157 eV and ∼168 eV. The XPS Zn 2p spectrum of undoped ZnO and ZnO:Er thin films have binding energy for Zn 2p3/2 (~ 1021 eV) and Zn 2p1/2 (~1045eV) were found no shift in binding energy after the incorporation of Er. Meanwhile, after Er incorporates into ZnO, the O 1s spectrum is composed two peak of binding energy (BE) at ~530.5eV and the shoulder about 532.5 eV.Keywords: ZnO thin films, ZnO:Er, XPS, binding energy
Co-Authors Agus Setyo Budi Iwan Sugihartono