Zhangfang HU
The Chongqing University of Posts and Telecommunications, Chongqing

Published : 1 Documents Claim Missing Document
Claim Missing Document
Check
Articles

Found 1 Documents
Search

SVD-based MEMS Dynamic Testing Technology Zhangfang HU; Chao JI; Yuan LUO
Indonesian Journal of Electrical Engineering and Computer Science Vol 11, No 1: January 2013
Publisher : Institute of Advanced Engineering and Science

Show Abstract | Download Original | Original Source | Check in Google Scholar

Abstract

 To obtain the MEMS micro structure's high resolution measurement dynamic parameters ,this paper ,by obtaining stroboscopic imaging technology of micro structure of moving image sequence,  proposed one kind based on the phase correlation technique and singular value decomposition technique combining sub-pixel measurement method. By the method of phase correlation, image space coordinate can transform into the frequency domain to the coordinates of the parameter space. And then through the singular value decomposition technique to obtain the correlation matrix, using the least-squares fitting, get the sub-pixel level displacement measurement results. The experimental results show that, with this method of measuring MEMS micro structure plane motion amplitude can reach sub-pixel accuracy, and can be effectively reduced by uneven illumination effect on the measuring result, thereby increasing the measurement results of stability and reduces the measuring error. DOI: http://dx.doi.org/10.11591/telkomnika.v11i1.1870