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All Journal Bulletin of Electrical Engineering and Informatics Bulletin of Electrical Engineering and Informatics
Aaditi Joshi, Aaditi
Arizona State University
Computer Science & IT Electrical & Electronics Engineering Engineering

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Journal : Bulletin of Electrical Engineering and Informatics

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Characterization of Sandia Capacitive Comb-finger MEMS Accelerometers Joshi, Aaditi; Redkar, Sangram; Sugar, Thomas
Bulletin of Electrical Engineering and Informatics Vol 4, No 4: December 2015
Publisher : Institute of Advanced Engineering and Science

Show Abstract | Download Original | Original Source | Check in Google Scholar | DOI: 10.11591/eei.v4i4.435

Abstract

This paper discusses various methods for testing the performance of MEMS capacitive comb-finger accelerometers manufactured by Sandia National Laboratories. The use of Capacitive MEMS devices requires complex circuits for measurement of capacitance and the Sandia MEMS accelerometer’s capacitance changes in a very small femto-farad (fF) range. The performance of accelerometer is tested using Analog Devices AD7747 sigma-delta capacitance to digital converter. The response of a MEMS capacitive accelerometer to various tests is useful for testing and characterization and investigate it’s suitability for various applications.
Co-Authors Sangram Redkar Thomas Sugar, Thomas