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All Journal Pillar of Physics: Jurnal Berkala Ilmiah Fisika
Debi Rianto
Department of Physics, Durham University, South Rd, Durham, DH1 3LE
Earth & Planetary Sciences Materials Science & Nanotechnology Physics

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Scanning Electron Microscopy for Nanostructure Analysis of Hybrid Multilayer Coating Debi Rianto
PILLAR OF PHYSICS Vol 15, No 2 (2022)
Publisher : Department of Physics – Universitas Negeri Padang UNP

Show Abstract | Download Original | Original Source | Check in Google Scholar | DOI: 10.24036/14084171074

Abstract

Scanning Electron Microscope (SEM) has been used in various studies to retrieve detailed information on nanomaterial structure. This study is an effort to propose SEM as the proper tool to investigate the properties of Hybrid Multilayer Coating as our model. The analysis should include nanoparticle size and its distribution on the surface, the thickness of the layers, the chemical composition and the crystal grain size in the layers. Several methods in SEM are beneficial to characterize these features are topography image, compositional image, X-Ray Spectrometry and Electron Backscattered Diffraction pattern. This technique also has several limitations ranging from chemical sensitivity, resolution to sample preparation
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