Article Per Year (5 Year)
p-Index From 2021 - 2026
0
P-Index
This Author published in this journals
All Journal ALCHEMY Jurnal Penelitian Kimia
Slamet Widodo
Pusat Penelitian Elektronika dan Telekomunikasi, Lembaga Ilmu Pengetahuan Indonesia (PPET-LIPI) Kampus LIPI, Bandung
Chemical Engineering, Chemistry & Bioengineering Chemistry Energy Environmental Science Materials Science & Nanotechnology

Published : 1 Documents Claim Missing Document
Claim Missing Document
Check
Articles

Found 1 Documents
Search

 1 
Process Technology Of Fabrication NO2 Gas Sensor Devices With Active Layer In2O3 Slamet Widodo
ALCHEMY Jurnal Penelitian Kimia Vol 10, No 1 (2014): March
Publisher : UNIVERSITAS SEBELAS MARET (UNS)

Show Abstract | Download Original | Original Source | Check in Google Scholar | DOI: 10.20961/alchemy.10.1.11.69-86

Abstract

This paper discuss the design and fabrication of NO2 gas sensor based on metal oxide using thick film technology was described. The design of gas sensor is consisted of components, i.e. heater, electrode (interdigital fingers) and sensitive layer from In2O3 material. This sensor has been designed as multilayers with heater and both electrodes in one surface, in accordance with miniaturisation aspect, heat distribution and less consumption of energy from the sensor device. The heater and electrode were fabricated on alumina substrate (aluminum oxide/Al2O3) with silver paste. The In2O3 layer provides\ resistance change when it is exposed by NO2 gas. It indicates that this sensor device has a potency to be used as NO2 detector.
Co-Authors