Indium doped zinc oxide (IZO) thin films were prepared by DC- magnetron sputtering technique
on glass at ambient substrates temperature with different thickness. The effect of thickness of films on the
structure and optical properties of the films was investigated. The crystal structure and orientation of the films
were studded by XRD pattern. All the deposited films are polycrystalline and the dependence of preferred
orientation, peak intensities and grain size on the filmâs thicknesses are investigated. The optical absorbance
and transmittance through the films was measured spectrophotometrically in the wavelength range 350-900
nm. The absorption coefficient, optical energy gap, Urbach energy, optical constants ( refractive index, extinction
coefficient, dielectric constant) and dispersion parameters, such as single-oscillator energy, dispersive energy
were determined with different thickness of films and analyzed.
Keywords: ZnO:In, Sputtering, Crystal structure, Optical properties
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