Journal of Engineering and Technological Sciences
Vol. 39 No. 2 (2007)

Experimental Study of an Aluminum-Polysilicon Thermopile for Implementation of Airflow Sensor on Silicon Chip

Ayub Subandi (Microelectronic Center, ITB, Jl. Ganesha No.10, Bandung 40132)
Irman Idris (Microelectronic Center, ITB, Jl. Ganesha No.10, Bandung 40132. School of Electrical Engineering and Informatics, ITB, Jl. Ganesha No.10, Bandung 40132)
Adang Suwandi Ahmad (Microelectronic Center, ITB, Jl. Ganesha No.10, Bandung 40132. School of Electrical Engineering and Informatics, ITB, Jl. Ganesha No.10, Bandung 40132)



Article Info

Publish Date
13 Sep 2013

Abstract

A multi-directional airflow sensor has been realized. The essential part of  the  considered  sensor  is  a  thermopile  configuration,  which  enables  the measurement  of  flow  speed  and  flow  direction.  The  thermopile  is  a  series arrangement  of  eight  thermocouples.  A  thermocouple  converts  a  difference  in temperature  into  an  electrical  signal,  by  means  of  the  Seebeck  effect .  The thermocouples  are  made  of  aluminum-N-type  polysilicon  junctions.  The incoming  flow  is  heated  and  the  degree  of  heat  transfer  by  convection  to  the flow, depends on the speed of the flow; the faster the flow the smaller the heat transfer,  which leads to a smaller (Seebeck) output  voltage of  the thermopiles. After  signal  conditioning  -  i.e.,  filtering  and  amplification  by  means  of  an amplification system  -  the electrical output signals of the thermopiles are further signal-processed by applying analog-to-digital signal conversion, so that finally the flow speed and the flow direction can be properly displayed on a computer screen. The measured values of the Seebeck coefficient or thermopower (S) were in the range of: 0.43 to 0.68 mV/K which are in good agreement with the values found in the literature: 0.5 to 0.7 mV/K. Moreover, it  was found that the  flow speed  Uï‚¥ is  proportional  to  the  reciprocal  value  of  the  square  of  the  output voltage of the outgoing thermopile.

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Journal Info

Abbrev

JETS

Publisher

Subject

Engineering

Description

Journal of Engineering and Technological Sciences welcomes full research articles in the area of Engineering Sciences from the following subject areas: Aerospace Engineering, Biotechnology, Chemical Engineering, Civil Engineering, Electrical Engineering, Engineering Physics, Environmental ...