Structural Investigation and Properties Of Tio2 Thin Film Prepared by Sol-Gel Spin Coating

Diani Galih Saputri (Universiti Tun Hussein Onn Malaysia)
Mohd Khairul Bin Ahmad (Universiti Tun Hussein Onn Malaysia)
Agus Supriyanto (Universitas Sebelas Maret)
Achmad Nasyori (Department of Physics, Koc University, Istanbul)
Salisu I Kunya (Department of Science Laboratory Technology, Jigawa State Polytechnics, Dutse)
Nurul Amiera Shahida Maarof (Universiti Tun Hussein Onn Malaysia)
Siti Nurhaziqah Abd Majid (Universiti Tun Hussein Onn Malaysia)
Anis Zafirah Mohd Ismail (Universiti Tun Hussein Onn Malaysia)
Shazleen Ahmad Ramli (Universiti Tun Hussein Onn Malaysia)

INDONESIAN JOURNAL OF APPLIED PHYSICS
Vol 12, No 2 (2022): IJAP Volume 12 ISSUE 02 YEAR 2022

We report the structural properties of TiO2 (Titanium dioxide) thin films grown using sol-gel spin coating method for temperature treatment (with temperature 50o C and without temperature) The difference in temperature is carried out to determine changes in the surface of the sample by using heating or not. Ideally, the thickness of the TiO2 layer ranges from 10-15 μm, therefore in this study it was carried out in 5 layers. Field Emission Scanning Electron Microscopy (FESEM) consist of surface morphology, Cross-section sample, and EDX images, respectively, providing the structure of the surface. The result confirm that temperature treatment can damage the surface coating, this is proven by the shape of the crack in the coating.