Jurnal Sains Materi Indonesia
Vol. 1 No. 2 (2000): Jurnal Sains dan Materi Indonesia

FABRIKASI LAPISAN TIPIS CuInS2 MENGGUNAKAN METODA REACTIVE SPUTTERING

Mohammad Mustafa Sarinanto (Unknown)

Article Info

Publish Date
27 Mar 2025

Abstract

FABRIKASI LAPISAN TIPIS CuInS2 MENGGUNAKAN METODA REACTIVE SPUTTERING. Lapisan tipis CuInS2 telah dipreparasi di atas Pyrex slide glass dengan menggunakan metoda reactive sputtering, dengan temperatur substrat 200-350°C dimana sebagai gas pereaksi digunakan CS2. Kecepatan pertumbuhannya adalah 0,5 — 1 pm/jam. Film kristal yang diperoleh mempunyai orientasi (112) sejajar dengan substrat.

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Journal Info
Jurnal Sains Materi Indonesia
Website

Abbrev

jsmi

Publisher

BRIN Publishing

Subject

Engineering Industrial & Manufacturing Engineering Materials Science & Nanotechnology

Description

Jurnal Sains Materi Indonesia (Indonesian Journal of Materials Science, JUSAMI) is an international peer-reviewed journal that publishes significant and important research from all areas of materials science and engineering. The topics discussed in JUSAMI are research & development results in ...