Indonesian Physical Review
Vol. 9 No. 2 (2026)

THE EFFECT OF DEPOSITION TEMPERATURE ON Cu2ZnSnS4 (CZTS) THIN FILMS GROWN BY DC MAGNETRON SPUTTERING

Fianti Fianti (Physics Department, Semarang State University, Semarang)
Shila Artha Mulia (Physics Department, Semarang State University, Semarang)
Nabila Rizkina Sari (Physics Department, Semarang State University, Semarang)
Siti Firdhosiyah (Physics Department, Semarang State University, Semarang)
Budi Astuti (Physics Department, Semarang State University, Semarang)
Putut Marwoto (Physics Department, Semarang State University, Semarang)
Kyoo Ho Kim (School of Materials Science and Engineering, Yeungnam University, Gyeongsan 712-749)
Muhammad Ikhlasul Amal (Research Center for Metallurgy and Materials, Indonesian Institute of Science, Serpong)
Ersan Yudhapratama Muslih (Mechanical Engineering, Trisakti University, Jakarta Barat)



Article Info

Publish Date
04 Mar 2026

Abstract

Cu₂ZnSnS₄ thin films were successfully deposited on soda lime glass substrates using the DC Magnetron Sputtering method at a plasma power of 42 W, an argon gas pressure of 500 mTorr, and deposition temperatures ranging from 27 °C to 400 °C for 7 hours, using a Cu₂ZnSnS₄ target with 99% purity. The effect of varying temperatures was characterized by using X-ray Diffraction (XRD) to determine the film structure, Scanning Electron Microscopy with Energy Dispersive X-ray Spectroscopy (SEM-EDX) to analyze morphology and composition, and UV-Vis-NIR spectrophotometry to evaluate optical properties. Film composition showed non-stoichiometric characteristics, with elemental ranges of Cu (20.66–32.81) %, Zn (14.08–25.67) %, Sn (21.87–37.05) %, and S (25.42–31.22) %. All samples exhibited a Cu/(Zn+Sn) ratio of less than 1, indicating Cu-poor compositions typical of p-type semiconductors. XRD analysis revealed that the formation of the Cu₂ZnSnS₄ phase began at a deposition temperature of 100 °C, while stable kesterite Cu₂ZnSnS₄ crystals were obtained at 400 °C, corresponding to the (112) crystal plane. The absorption coefficients and band gap energies ranged from 10⁴ to 10⁵ cm ¹ and from 1.34 to 2.175 eV, respectively, confirming the suitability of the films for solar cell applications. SEM observations indicated that higher deposition temperature promoted more successful grain growth. Overall, higher deposition temperatures yield better Cu₂ZnSnS₄ thin films.

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Journal Info

Abbrev

ipr

Publisher

Subject

Education Physics

Description

Indonesian Physical Review is a peer review journal which is managed and published by Physics Departement, Faculty of Mathematics and Natural Sciences, Universitas Mataram. This journal is published periodically three times a year, in January, May and September. IPR is Open Accsess for all readers ...