<![CDATA[Background: The development of industrial technology in the Industry 4.0 era has encouraged the implementation of intelligent monitoring systems to improve machine reliability and operational efficiency. However, machine fault diagnosis systems based on artificial intelligence often face limitations in terms of interpretability because the models used are complex and difficult to explain. Objective: This study aims to develop a deep learning-based industrial machine fault diagnosis system integrated with an Explainable Artificial Intelligence (XAI) approach to improve diagnostic accuracy while providing interpretable insights for users. Method: The research method involves collecting data from industrial machine sensors consisting of vibration signals, temperature measurements, and acoustic signals, followed by data preprocessing and feature extraction processes. The processed data are then used to train a deep learning-based diagnostic model, after which explainability methods such as SHAP or LIME are applied to analyze the contribution of each feature to the model’s prediction results. Model performance is evaluated using accuracy, precision, recall, and F1-score metrics. Results: The results indicate that the proposed deep learning model achieves better performance compared to conventional machine learning methods such as Support Vector Machine and Random Forest. Furthermore, the explainability analysis reveals that vibration amplitude, increases in machine component temperature, and anomalies in acoustic signals are the main factors influencing machine fault detection. Therefore, the proposed system not only improves the accuracy of machine fault diagnosis but also provides transparency in the decision-making process, thereby supporting the implementation of predictive maintenance in smart manufacturing environments.]]>
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