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All Journal International Journal of Applied Power Engineering (IJAPE) MONSU'ANI TANO Jurnal Pengabdian Masyarakat
Wibowo, Wahyu Kunto
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Agriculture, Biological Sciences & Forestry Civil Engineering, Building, Construction & Architecture Education Electrical & Electronics Engineering Physics Social Sciences

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Journal : International Journal of Applied Power Engineering (IJAPE)

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Fabrication of hydrogenated amorphous silicon-based solar cells using RF-PECVD Prayogi, Soni; Wibowo, Wahyu Kunto
International Journal of Applied Power Engineering (IJAPE) Vol 14, No 1: March 2025
Publisher : Institute of Advanced Engineering and Science

Show Abstract | Download Original | Original Source | Check in Google Scholar | DOI: 10.11591/ijape.v14.i1.pp173-179

Abstract

Thin-film solar cells made of hydrogenated amorphous silicon have succeeded in crystallization technologies as a less expensive alternative because of their straightforward design, sparse material requirements, low processing temperatures, and cheap manufacturing costs. A multi-chamber plasma-accelerated chemical vapor deposition apparatus driven by radio frequency was used to create the intrinsic and extrinsic layers of the a-Si: H solar cell. Multi-chamber allows us to upgrade each layer of the gadget utilizing a distinct space, preventing cross-contamination throughout the procedure. To enhance cell conversion efficiency, a thorough analysis has been conducted in this work to evaluate the manufacturing process and comprehend the link between process factors and property dependency. Our findings demonstrate an amorphous Si: H solar cell with a maximum cell efficiency of 6.52%, Voc 880 mV, Isc 11.33 mA/cm2, and FF 65%. We think that a modeling method followed by manufacturing can further enhance the performance of a-Si: H-based solar cell devices.
Co-Authors Amarilies, Harummi Sekar Baliwangi, Lahar Kurnia, Gita Pratami, Putri Monika Prayogi, Soni Sari, Alifiana Permata Sukarno, Iwan Tazkiya, Osel Nur `