A. S. M. Zain
Universiti Teknikal Malaysia Melaka (UTeM)

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Journal : Bulletin of Electrical Engineering and Informatics

Performance analysis of ultrathin junctionless double gate vertical MOSFETs K. E. Kaharudin; Z. A. F. M. Napiah; F. Salehuddin; A. S. M. Zain; Ameer F. Roslan
Bulletin of Electrical Engineering and Informatics Vol 8, No 4: December 2019
Publisher : Institute of Advanced Engineering and Science

Show Abstract | Download Original | Original Source | Check in Google Scholar | Full PDF (665.525 KB) | DOI: 10.11591/eei.v8i4.1615

Abstract

The main challenge in MOSFET minituarization is to form an ultra-shallow source/drain (S/D) junction with high doping concentration gradient, which requires an intricate S/D and channel engineering. Junctionless MOSFET configuration is an alternative solution for this issue as the junction and doping gradients is totally eliminated. A process simulation has been developed to investigate the impact of junctionless configuration on the double-gate vertical MOSFET. The result proves that the performance of junctionless double-gate vertical MOSFETs (JLDGVM) are superior to the conventional junctioned double-gate vertical MOSFETs (JDGVM). The results reveal that the drain current (ID) of the n-JLVDGM and p-JLVDGM could be tremendously enhanced by 57% and 60% respectively as the junctionless configuration was applied to the double-gate vertical MOSFET. In addition, junctionless devices also exhibit larger ION/IOFF ratio and smaller subthreshold slope compared to the junction devices, implying that the junctionless devices have better power consumption and faster switching capability.