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All Journal International Journal of Reconfigurable and Embedded Systems (IJRES)
Karim Rhofir
Sultan Moulay Slimane University
Economics, Econometrics & Finance

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Features measurement analysis of pull-in voltage for embedded MEMS Hajar Baghdadi; Mohamed Lamhamdi; Karim Rhofir
International Journal of Reconfigurable and Embedded Systems (IJRES) Vol 11, No 2: July 2022
Publisher : Institute of Advanced Engineering and Science

Show Abstract | Download Original | Original Source | Check in Google Scholar | DOI: 10.11591/ijres.v11.i2.pp146-156

Abstract

The embedded micro electro mechanical systems (MEMS) is a technology that is creating a new era in all fields and especially in the internet of things (IoT) field. MEMS are necessary components for the realization of tiny micro/nano circuits. For this reason, designers are facing many challenges in designing embedded MEMS for achieving efficient products. The pull-in voltage is one of the most important parameters of MEMS design. In this work, we are interested in the analysis of some geometrical and mechanical parameters for the pull-in. The objective is to study of the concept of pull-in voltage in order to reduce it. First, we made a simulation to choose the appropriate material achieving a lower pull-in voltage. Then, we analysed the impact of geometrical parameters on the pull-in voltage. In this work, Finite element method using COMSOL Multiphysics® software is employed to compute the Pull-in voltage and study the behaviour of the MEMS Switch in order to optimize it. Pull-in voltage can be reduced by careful selection of the cantilever material and it can be further reduced by changing the beam parameters.
Co-Authors Hajar Baghdadi Mohamed Lamhamdi