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All Journal Indonesian Journal of Physics (IJP)
Lusitra Munisa
Program Studi Ilmu Fisika, Program Pascasarjana Universitas Indonesia, Jakarta 10430
Astronomy Computer Science & IT Earth & Planetary Sciences Electrical & Electronics Engineering Energy Engineering

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Pengaruh Perlakuan Implantasi Hidrogen terhadap Sifat Struktur Lapisan Tipis Amorf Silikon Karbon (a-SiC:H) Hasil Deposisi Metode DC Sputtering Rosari Saleh; Lusitra Munisa
Indonesian Journal of Physics Vol 14 No 2 (2003): Vol. 14 No.2, April 2003
Publisher : Institut Teknologi Bandung

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Abstract

Infrared absorption measurement of hydrogenated amorphous silicon carbon films (a-SiC:H) deposited by dc sputtering method have been performed for prior- and after hydrogen implantation. The films were deposited by silicon target in argon and methane gas mixtures. The results suggest that both 720 and 780 cm-1 absorption are due to Si-C stretching mode and the transition of the absorption from 2000 to 2100 cm-1 as the methane flow rate increase is not due to a change in carbon concentration, but rather to the formation of voids as supported by hydrogen effusion experiment results.
Relasi Gap Optis dengan Struktur Ikatan Lapisan Tipis Amorf Silikon Karbon (a-SiC:H) Hasil Deposisi Metode DC Sputtering Rosari Saleh; Lusitra Munisa
Indonesian Journal of Physics Vol 14 No 2 (2003): Vol. 14 No.2, April 2003
Publisher : Institut Teknologi Bandung

Show Abstract | Download Original | Original Source | Check in Google Scholar | Full PDF (125.147 KB)

Abstract

The influence of hydrogen and carbon incorporation on the optical gap of amorphous silicon carbon (a-SiC:H) films deposited by dc sputtering methods were observed and analysed using ultra violet-visible (UV-VIS) and infrared spectroscopy. Hydrogen content NH and carbon concentration NC in the films increases considerably with increasing methane flow rate. Both hydrogen and carbon content induces the widening of the optical gap through its linear relation with Si-H, C-H and Si-C vibration absorption. For low methane flow rate, the widening of optical gap is mainly due to an increase of hydrogen content. The incorporation of carbon led to increase the optical gap for higher methane flow rate.
Co-Authors Rosari Saleh