TELKOMNIKA (Telecommunication Computing Electronics and Control)
Vol 16, No 1: February 2018

OFET Preparation by Lithography and Thin Film Depositions Process

Sujarwata Sujarwata (Universitas Negeri Semarang)
Fianti Fianti (Universitas Negeri Semarang)
Langlang Handayani (Universitas Negeri Semarang)
Aji Purwinarko (Universitas Negeri Semarang Kampus Sekaran Gunungpati Semarang)
Susilo Susilo (Universitas Negeri Semarang)



Article Info

Publish Date
01 Feb 2018

Abstract

The length of the channel OFET based thin film is determined during preparation takes place using the technique of lithography and mask during the metal deposition process. The lithography technique is the basic process steps in the manufacture of semiconductor devices. Lithography is the process of moving geometric shapes mask pattern to a thin film of material that is sensitive to light. The pattern of geometric shapes on a mask has specifications, as follows: long-distance source and drain channels varied, i.e. 100 μm, the width of the source and drain are made permanent. Bottom contact OFET structure has been created using a combination of lithography and thin film deposition processes.

Copyrights © 2018






Journal Info

Abbrev

TELKOMNIKA

Publisher

Subject

Computer Science & IT

Description

Submitted papers are evaluated by anonymous referees by single blind peer review for contribution, originality, relevance, and presentation. The Editor shall inform you of the results of the review as soon as possible, hopefully in 10 weeks. Please notice that because of the great number of ...