Ganendra: Majalah IPTEK Nuklir
Volume 26 Nomor 1, 2023

THE EFFECT OF THE DC-SPUTTERING PROCESS ON CHANGES IN THE HARDNESS VALUE AND ELEMENTS COMPOSITION OF BIOCOMPATIBLE STAINLESS STEEL 316L MATERIAL

Sahabudin, Nuha Nazilah (Unknown)
Mukaromah, Uli Aprilia (Unknown)
Andriyanti, Wiwien (Unknown)
Sutanto, Heri (Unknown)



Article Info

Publish Date
14 Mar 2024

Abstract

Titanium Dioxide (TiO2) thin films have intriguing optical, photocatalytic, and electrical properties and have been investigated for various applications, including solar cells, biomaterials, corrosion-resistant materials, and gas sensor. In this study, TiO2 thin films were deposited on the surface of 316L Stainless Steel  to improve its mechanical properties as an implant material. The deposition method used was DC sputtering with variations in deposition times of 30, 60, 90, 120, and 150 minutes. Vickers hardness test and SEM-EDX characterization were carried out to determine the hardness value, elemental composition, and thickness of the TiO2 thin film formed. Based on these tests, it was discovered that the optimal hardness value of316L stainless Steel  material was attained at a deposition period of 90 minutes with a hardness value of 170.10 VHN, and the average thickness of the layer formed was ± 119.02 μm.

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Journal Info

Abbrev

ganendra

Publisher

Subject

Computer Science & IT Other

Description

Jurnal Iptek Nuklir Ganendra merupakan jurnal ilmiah hasil litbang dalam bidang iptek nuklir, diterbitkan oleh Pusat Teknologi Akselerator dan Proses Bahan (PTAPB) - BATAN Yogyakarta. Frekuensi terbit dua kali setahun setiap bulan Januari dan ...