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All Journal Ganendra: Majalah IPTEK Nuklir
Sahabudin, Nuha Nazilah
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Computer Science & IT Other

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THE EFFECT OF THE DC-SPUTTERING PROCESS ON CHANGES IN THE HARDNESS VALUE AND ELEMENTS COMPOSITION OF BIOCOMPATIBLE STAINLESS STEEL 316L MATERIAL Sahabudin, Nuha Nazilah; Mukaromah, Uli Aprilia; Andriyanti, Wiwien; Sutanto, Heri
GANENDRA Majalah IPTEK Nuklir Volume 26 Nomor 1, 2023
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Show Abstract | Download Original | Original Source | Check in Google Scholar | DOI: 10.55981/gnd.2023.6834

Abstract

Titanium Dioxide (TiO2) thin films have intriguing optical, photocatalytic, and electrical properties and have been investigated for various applications, including solar cells, biomaterials, corrosion-resistant materials, and gas sensor. In this study, TiO2 thin films were deposited on the surface of 316L Stainless Steel  to improve its mechanical properties as an implant material. The deposition method used was DC sputtering with variations in deposition times of 30, 60, 90, 120, and 150 minutes. Vickers hardness test and SEM-EDX characterization were carried out to determine the hardness value, elemental composition, and thickness of the TiO2 thin film formed. Based on these tests, it was discovered that the optimal hardness value of316L stainless Steel  material was attained at a deposition period of 90 minutes with a hardness value of 170.10 VHN, and the average thickness of the layer formed was ± 119.02 μm.
Co-Authors Heri Sutanto Mukaromah, Uli Aprilia WIWIEN ANDRIYANTI