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All Journal ELINVO (Electronics, Informatics, and Vocational Education)
Bangert, Axel
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Computer Science & IT Education Electrical & Electronics Engineering

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Multi-Objective Optimization of MEMS-based Box Pattern Microheaters Using Response Surface Method Setyawati, Onny; Choiron, Moch. Agus; Bangert, Axel; Sandhagen, Carl
Elinvo (Electronics, Informatics, and Vocational Education) Vol 9, No 2 (2024): November 2024
Publisher : Department of Electronic and Informatic Engineering Education, Faculty of Engineering, UNY

Show Abstract | Download Original | Original Source | Check in Google Scholar | DOI: 10.21831/elinvo.v9i2.77133

Abstract

We present a response surface method to evaluate multi-objective optimization for MEMS-based microheater design. Box pattern, the standard microheater shape, was selected in this study since it has a uniform temperature distribution compared to other patterns. The optimum parameters are used to obtain the maximum total current density and Joule heat.  Based on a hybrid of the Response Surface Method and Central Composited Design, the model simulation emerged with 25 sets of Design Experiments.  As expected, the voltage is proportional to the increased output temperature and Joule heat of the microheater. Material thermal conductivity, anchor length and thickness of the heating element are included as design variables for the optimization. The microheater thicknesses of 4.23 - 4.55 µm, length of 40 µm and thermal conductivity of materials of approximately between 52 to 66 Wm-1K-1 became the optimized results at 1 V input voltage to obtain a maximum Joule heat of 4.9x105 W/mm3 and total current density of 5.6x107 mA/mm2.
Co-Authors Moch. Agus Choiron Onny Setyawati Sandhagen, Carl