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Pengaruh Sputtering TiN Terhadap Kekerasan Permukaan dan Struktur Mikro Pada Material Stainless Steel 316L Jemssy Ronald Rohi; Elkana Bilak Lopo; Boy Bistolen
Jurnal Teknik Mesin Vol 17 No 1 (2024): Jurnal Teknik Mesin
Publisher : Politeknik Negeri Padang

Show Abstract | Download Original | Original Source | Check in Google Scholar | DOI: 10.30630/jtm.17.1.1196

Abstract

Metal-based biomaterials are highly rust-resistant. A key property that metal-based biomaterials must possess is excellent biocompatibility with living cells. AISI 316L is widely used for implantation purposes in orthopedic surgery due to its good mechanical properties and low price, but AISI 316L lacks good biocompability with the body so that implant materials with AISI 316L material cannot be used for a long period of time. This research aims to study the effect of TiN sputtering process on AISI 316L stainless steel material and titanium target material as a coating on the surface. The sputtering process was carried out on the 316L surface a variation of sputtering time of 60, 90, 120 and 150 minutes with a gas variation ratio of 20% N2 and 30% N2, using a voltage of 5 kV and the current used was 5-10 mA at a pressure of 0.079 mbar. The results of hardness testing on 316L material with TiN sputtering treatment can increase the hardness on the surface of the material. The surface hardness value of the effect 30% N2 gas ratio and sputtering duration of 90, 120 and 150 minutes respectively is 305 kgf/mm­2, 310 kgf/mm2 and 334 kgf/mm2, this treatment has significant increase in hardness at 90, 120, and 150 minutes. Microstructure testing to measure the thickness of the electroplating layer results, showing that the thickness of the layer resulting from the sputtering process with a gas ratio of 30% N2 and a TiN sputtering duration of 120 minutes shows there are vacancies on the surface inserted by hard TiN atoms.
PENGARUH SPUTTERING TiN TERHADAP KEKASARAN, KEKERASAN PERMUKAAN MATERIAL AISI316L Jemssy Ronald Rohi; Priyo Tri Iswanto; Tjipto Sujitno; Erich Umbu Kondi
Jurnal Poli-Teknologi Vol. 18 No. 3 (2019)
Publisher : Politeknik Negeri Jakarta

Show Abstract | Download Original | Original Source | Check in Google Scholar | DOI: 10.32722/pt.v18i3.2412

Abstract

AISI 316L is widely used for implantation in orthopedic surgery due to its good corrosion resistance, mechanical properties and low cost. However, AISI 316L is not well suited for biocompatibility with the body, so implant material with AISI 316L can’t be used for a long time. One way to improve the corrosion resistance and mechanical properties of AISI 316L is to perform a surface treatment such as sputtering. This study discusses the effect of deposition sputtering TiN of 60, 90, 120 and 150 minutes on roughness and surface hardness at a ratio of argon gas and nitrogen to 80% Ar:20% N2. The results of the surface roughness value of the TiN sputtering layer deposited to AISI 316L for 60, 90, 120, and 150 minutes were 0.02 μm, 0.04 μm, 0.06 μm, and 0.04 μm respectively. This shows that the coating time of TiN in AISI 316L has no significant influence on value of surface roughness. Surface hardness results at 60, 90, 120, and 150 minutes were obtained with 268 HVN, 275 HVN, 278 HVN and 282 HVN. Increased hardness value, as the TiN thin layer has a higher hardness value compared to AISI 316L. The longer the deposition time, the more layers are formed and the layer becomes thicker. With the thickness of the layer, the density at the grain boundary increases. Because the higher density leads to grain growth, in which form micropores.