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All Journal Jurnal Ilmu Dasar Jurnal Neutrino : jurnal fisika dan aplikasinya JURNAL FISIKA Prosiding Universitas PGRI Palembang Jurnal Matematika & Sains GRADIEN JFA (Jurnal Fisika dan Aplikasinya) Jurnal Fisika dan Terapannya
Toto Winata
Institut Teknologi Bandung
Control & Systems Engineering Mathematics Physics

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Investigasi Pengaruh Daya RF terhadap Morfologi Silicon Nanowire pada Penumbuhan dengan Metode PECVD Hidayat, Aulia Fikri; Winata, Toto
Jurnal Fisika Vol 9, No 1 (2019)
Publisher : Universitas Negeri Semarang

Show Abstract | Download Original | Original Source | Check in Google Scholar | DOI: 10.15294/jf.v9i1.18811

Abstract

Silicon nanowire (SiNW) merupakan material berstruktur nano yang pemanfaatannya cukup luas, diantaranya yaitu sebagai material divais elektronik, sebagai material biosensor, dan sebagai sistem pembawa obat. Penumbuhan SiNW salah satunya dapat dilakukan dengan metode PECVD (plasma-enhanced chemical vapor deposition). Nikel digunakan sebagai katalis dalam penumbuhan SiNW pada penelitian ini. Lapisan tipis nikel diberi perlakuan annealing pada suhu 600°C selama 6 jam untuk memperoleh butiran nikel sebagai pemandu tumbuhnya nanowire. Penumbuhan SiNW dilakukan dengan metode PECVD dengan memvariasikan daya frekuensi radio (RF) reaktor sebesar 8 watt, 10 watt, dan 20 watt. Diameter rata-rata untuk daya 8 watt, 10 watt, dan 20 watt berturut-turut adalah 1143,17 nm; 1490,27 nm; dan 2605,26 nm. Morfologi permukaan dilihat dengan pencitraan scanning electron microscope (SEM). Rasio aspek wire dengan daya RF penumbuhan 8 watt, 10 watt, dan 20 watt diinvestigasi dengan pencitraan SEM penampang lintang dengan hasil berturut-turut sebesar 23,3; 3,13; dan 0,33.
EXPLORING RAMAN SPECTROSCOPY OF CNTs: INFLUENCE OF HOTWIRE TEMPERATURES ON RBM, D AND G BANDS USING HWC-VHF-PCVD Abidin, Kurniati; Malago, Jasruddin D; Noor, Fatimah A.; Winata, Toto
Jurnal Neutrino:Jurnal Fisika dan Aplikasinya Vol 18, No 1 (2025): October
Publisher : Universitas Islam Negeri Maulana Malik Ibrahim Malang

Show Abstract | Download Original | Original Source | Check in Google Scholar | DOI: 10.18860/neu.v18i1.29679

Abstract

Carbon Nanotubes (CNTs) are nanostructured materials that offer mechanical, electrical, and thermal advantages, making them attractive for various technological applications. In this study, CNTs were synthesized using the Hot Wire Cell-Very High Frequency-Plasma Enhanced Chemical Vapor Deposition (HWC-VHF-PECVD) with hotwire temperature variation (225 °C, 275 °C, and 325 °C) as the main variable. Characterization of CNTs was conducted through Raman spectroscopy to evaluate the effect of hotwire temperature variation on the structure and quality of CNTs. The Raman test identified a characteristic RBM (Radial Breathing Mode) band around 100-300 cm⁻¹, a D-band around 1350 cm⁻¹ associated with structural defects, a G-band around 1580 cm⁻¹ indicating sp² carbon bonds, and a 2D-band around 2650-2700 cm⁻¹ associated with the graphitic layer stack. The quantitative analysis of Raman spectra showed ID/IG ratios of 0.94, 0.76, and 0.86 for CNTs synthesized at 225°C, 275°C, and 325°C, respectively, confirming that CNTs grown at 275°C exhibit the lowest structural disorder and highest graphitic crystallinity. The results show that the intensity of the G-band at 275°C hotwire temperature is higher than that at 225°C and 325°C, indicating better CNTs quality at this temperature. In addition, the Raman shift in the RBM-band for 275°Chotwire temperature is higher compared to 225°C and 325°C, indicating a variation in the diameter of the synthesized CNTs. This characterization reveals that the control of hotwire temperature greatly affects the structure and quality of CNTs, which is important for the optimization of the synthesis process and its application in the future.
Co-Authors Agus Kartono Altje Latununuwe Amiruddin Supu Andhy Setiawan Aulia Fikri Hidayat Darsikin Darsikin Diky Anggoro Endhah Purwandari Fatimah A. Noor Fatimah Arofiati Noor Fitri Suryani Arsyad Hasniah Aliah I Wayan Sukarjita Ida Usman Inge M. Sutjahja Iqbal Iqbal Jasruddin Daud Malago Jusman Jusman Kurniati Abidin Kurniati Abidin, Kurniati Laksono Trisnantoro M. Barmawi Mohamad Barmawi Muhammady, Shibghatullah Mursal Mursal Patricia Lubis, Patricia Ridwan Abdullah Sani Setiawan, Freddy Giovanni Sukirno Sukirno Syamsu Syamsu