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Journal : TELKOMNIKA (Telecommunication Computing Electronics and Control)

OFET Preparation by Lithography and Thin Film Depositions Process Sujarwata Sujarwata; Fianti Fianti; Langlang Handayani; Aji Purwinarko; Susilo Susilo
TELKOMNIKA (Telecommunication Computing Electronics and Control) Vol 16, No 1: February 2018
Publisher : Universitas Ahmad Dahlan

Show Abstract | Download Original | Original Source | Check in Google Scholar | DOI: 10.12928/telkomnika.v16i1.6544

Abstract

The length of the channel OFET based thin film is determined during preparation takes place using the technique of lithography and mask during the metal deposition process. The lithography technique is the basic process steps in the manufacture of semiconductor devices. Lithography is the process of moving geometric shapes mask pattern to a thin film of material that is sensitive to light. The pattern of geometric shapes on a mask has specifications, as follows: long-distance source and drain channels varied, i.e. 100 μm, the width of the source and drain are made permanent. Bottom contact OFET structure has been created using a combination of lithography and thin film deposition processes.
Co-Authors Adi, Mahargjo Hapsoro Aditya Marianti Akhmad Munawar Alfa Narendra Alfandy Himawan Bagus Rafli Amalia Langgundi, Fitri Amidi Amidi Amin Retnoningsih Amirul Mukminin Andestian, Defin Anggyi Trisnawan Putra Annindya Ardiansari Ardhi Prabowo Arif Widiyatmoko, Arif Arsyadani, Fathan Aryani, Nila Prasetya Aryono Adhi, Aryono Bambang Sugiantoro Budi Prasetiyo, Budi Budiman, Kholiq Cahyani, Rima Ayu Damayanti, Dela Rista Dela Rista Damayanti Dimarti, Safira Chairani Edi Subkhan, Edi Fathan Arsyadani Fianti Fianti, Fianti Fitri Arum Sasi, Fitri Arum Fridiyanto, Fridiyanto Hakim, M. Faris Al Hapsari, Renita Arianti Hasan Mukhibad Hasani, Azharu Alfi Ian Yulianti, Ian Indah Urwatin Wusqo Insan , Shiva Maulana Khoiru Islam, Muhamad Anbiya Nur Kasinyo Harto Langlang Handayani Lutfia Nur Hadiyanti, Lutfia Nur Mahargjo Hapsoro Adi Majidah Majidah Mardiansyah, M Fadil Martien Herna Susanti Melati, Inaya Sari Melissa Salma Darmawan MHD. Reza M.I. Pulungan Muhamad Taufiq Munawar, Akhmad Mutoriq, Alfat Nor Hafizah Ngajikin Nuni Widiarti Nur Kusuma Dewi Putra, Ngurah Made Darma Rahmawati, Sinta Kurnia Renita Arianti Hapsari Rima Ayu Cahyani Ririanti, Novia Puji Sri Siswati Subagja, Mona Subhan Subhan SUGIYANTO Sugiyarta Stanislaus, Sugiyarta Sujarwata Sujarwata Sukestiyarno Sukestiyarno Susilo Susilo Syuja Zhafran Rakha Krishandhie Syukron Salam, Syukron Tris Sugiarto Tsabit Azinar Ahmad Utis Sutisna Wahyu Hardyanto Wahyu Setyaningrum Widiyanto Widiyanto Woro Sumarni Yanuarto, Alfath YB. Praharto Yuliantika, Atika