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All Journal Faraday: Journal of Fundamental Physics, Research, and Applied Science
Ni’matut Tamimah
Politeknik Perkapalan Negeri Surabaya
Computer Science & IT Electrical & Electronics Engineering Energy Materials Science & Nanotechnology Physics

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Characterization of RF Voltage and Self-Bias under Power Variations in 13.56 MHz RF Sputtering System Aprilia Dewi Ardiyanti; Aslam Chitami Priawan Siregar; Ni’matut Tamimah
Faraday: Journal of Fundamental Physics, Research, and Applied Science Vol. 1 No. 2 (2025): Faraday: Journal of Fundamental Physics, Research, and Applied Science
Publisher : Universitas Pembangunan Nasional "Veteran" Jawa Timur

Show Abstract | Download Original | Original Source | Check in Google Scholar | DOI: 10.33005/faraday.v1i2.13

Abstract

RF Sputtering has been widely used as a deposition system on thin films. This study examines the impact of input power on RF voltage and self-bias voltage in an RF Sputtering system operating at a frequency of 13.56 MHz. Power variations were carried out in the range of 50 to 150 Watts to observe the changes in voltage produced during the plasma formation process. The experimental results indicate a linear dependency between power and both voltages, with a coefficient of determination (R²) above 0.9 and slope values of 2.86 and 0.96 for the RF voltage and self-bias voltage, respectively. The observed linear correlation indicates that adjusting power regulation can be utilized as an effective control parameter for both voltages, enabling the production of uniform and high-quality thin film deposition.
Comparison of Silver and Aluminum Patches on the Electromagnetic Radiation of a Microstrip Dipole Antenna Aslam Chitami Priawan Siregar; Aprilia Dewi Ardiyanti; Ni’matut Tamimah
Faraday: Journal of Fundamental Physics, Research, and Applied Science Vol. 2 No. 1 (2026): Faraday: Journal of Fundamental Physics, Research, and Applied Science
Publisher : Universitas Pembangunan Nasional "Veteran" Jawa Timur

Show Abstract | Download Original | Original Source | Check in Google Scholar | DOI: 10.33005/faraday.v2i1.54

Abstract

This paper compares silver (Ag) and aluminum (Al) as patch materials for a microstrip dipole antenna to examine how their electrical conductivities affect electromagnetic radiation performance. Both antennas were designed with identical geometrical and substrate parameters using the Finite-Difference Time-Domain (FDTD) method, varying only the patch material. Simulation results show that the resonant frequencies are 2.4700 GHz for Ag and 2.4649 GHz for Al, with excellent VSWR values 1.0839 and 1.0836 and return loss below –27 dB. Both materials exhibit reflected power below 0.2% and have nearly identical radiated power, namely 0.3647 W for silver (Ag) and 0.3646 W for aluminum (Al). Overall, silver and aluminum demonstrate almost identical radiation characteristics. Silver offers slightly better conductivity, while aluminum provides similar efficiency at lower cost, making it a practical alternative for lightweight and economical microstrip antenna applications.
Co-Authors Aprilia Dewi Ardiyanti Aslam Chitami Priawan Siregar