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Journal : TELKOMNIKA (Telecommunication Computing Electronics and Control)

OFET Preparation by Lithography and Thin Film Depositions Process Sujarwata Sujarwata; Fianti Fianti; Langlang Handayani; Aji Purwinarko; Susilo Susilo
TELKOMNIKA (Telecommunication Computing Electronics and Control) Vol 16, No 1: February 2018
Publisher : Universitas Ahmad Dahlan

Show Abstract | Download Original | Original Source | Check in Google Scholar | DOI: 10.12928/telkomnika.v16i1.6544

Abstract

The length of the channel OFET based thin film is determined during preparation takes place using the technique of lithography and mask during the metal deposition process. The lithography technique is the basic process steps in the manufacture of semiconductor devices. Lithography is the process of moving geometric shapes mask pattern to a thin film of material that is sensitive to light. The pattern of geometric shapes on a mask has specifications, as follows: long-distance source and drain channels varied, i.e. 100 μm, the width of the source and drain are made permanent. Bottom contact OFET structure has been created using a combination of lithography and thin film deposition processes.
Co-Authors - Masykur A.A. Ketut Agung Cahyawan W Abdul Azis Aditya Bagus Wicaksana Agus Yulianto Ahsin, Karima Asyifa Aisah, Dewi Nur Aji Purwinarko, Aji Amarthani, Nur Tirta Ananda, Bella Prima Ria Ananta, Joanna Patricia Ani Rusilowati Arif Widiyatmoko, Arif Bambang Subali Budhi, Setiawan Budi Astuti Budi Naini Mindyarto, Budi Naini Candra Fanleon Darsono, Teguh Dhamayanti, Lina Fitri DWI YULIANTI Eha Pitriyanita Ellianawati Ellianawati, Ellianawati Elsya Wynsa Maharani Putri Erna S, Natalia Febriyanto, Fauzan Fianti Fianti, Fianti Fitriyah, Wafirotul Fonny Dameaty Hutagalung Gesang Surya Kusuma Gita Surya Shabrina Givarin, Delvananta Halim, Musa Abdul Hartono Hartono Haydnn Caesha Maulana Hermin Nurhayati Hidayat, Feri Husna Arifah, Husna Imani, Asri Nur Indi Purnomo Indrawan Nur Cahyono Izah, Naelatul Jayanti, Galuh Dwi Liza Praptiwi, Liza Maulana Resha Vivadi Maulana, Haydnn Caesha Nabilla, Shalsa Yulia Nimas Puspitasari, Nimas Norma Eralita Nuni Wdiarti Nurhayati, Hermin Nur‘Aini, Syifa Hanum Nur’ainiyyah Hasni Palguni, Meilia Isnantoro Pangestu, Iklas Adi Prasetya Ariyani, Nila Pratiwi Dwijananti Priambada, Lingga Arya Puji Winarti Putra, Ngurah Made Darma Putri, Nabila Rakha R Indriyanto Risa Dwita Hardianti Safitri, Asifah Nur Saputri, Aneng Dewi Sarwi Sarwi ., Sarwi Sarwi Sarwi Setyaningsih, Natalia Erna Shelly Salista Rahmayanti Siti Khanafiyah Slamet Haryono Sudarmin Sudarmin Sugiyanto - Suharto Sujarwata Sujarwata Sunarno Sunarno Sunarno Susilo Susilo Sutikno Madnasri Syir Anatut Taqiyyah Teguh Darsono Usrek Tani Utina Wadiyo Wdiarti, Nuni Wicaksono, Praditya Widyaningrum, Winda Hastuti Wiyanto - Woro Sumarni