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Journal : TELKOMNIKA (Telecommunication Computing Electronics and Control)

OFET Preparation by Lithography and Thin Film Depositions Process Sujarwata Sujarwata; Fianti Fianti; Langlang Handayani; Aji Purwinarko; Susilo Susilo
TELKOMNIKA (Telecommunication Computing Electronics and Control) Vol 16, No 1: February 2018
Publisher : Universitas Ahmad Dahlan

Show Abstract | Download Original | Original Source | Check in Google Scholar | DOI: 10.12928/telkomnika.v16i1.6544

Abstract

The length of the channel OFET based thin film is determined during preparation takes place using the technique of lithography and mask during the metal deposition process. The lithography technique is the basic process steps in the manufacture of semiconductor devices. Lithography is the process of moving geometric shapes mask pattern to a thin film of material that is sensitive to light. The pattern of geometric shapes on a mask has specifications, as follows: long-distance source and drain channels varied, i.e. 100 μm, the width of the source and drain are made permanent. Bottom contact OFET structure has been created using a combination of lithography and thin film deposition processes.
Critical Condition in CuInAlSe2 Growth of Solar Cell Absorber Sujarwata Sujarwata; Fianti Fianti; J.Y. Jung; S.H. Lee; K.H. Kim; M.I. Amal
TELKOMNIKA (Telecommunication Computing Electronics and Control) Vol 14, No 3: September 2016
Publisher : Universitas Ahmad Dahlan

Show Abstract | Download Original | Original Source | Check in Google Scholar | DOI: 10.12928/telkomnika.v14i3.3644

Abstract

CuInAlSe2 (CIAS) thin films were prepared using pulsed laser deposition (PLD) and selenization. The PLD process utilized a certain kind of stacking order to deposit elemental films on glass substrates, layer by layer, for precursor preparation. They were designed to be Al- and Cu-deficient and selenized using two different heat treatment steps. According to its precursor compositional ratio, stacking order, and heat treatment, each CIAS film showed different properties and a critical condition. The crystalline phases, compositional ratio, morphology, and optical-electrical properties of the CIAS films are discussed here.   
Co-Authors Abu Sahmah Mohd Supaat Agus Yulianto Aji Purwinarko, Aji Al Aziz, Sofyan Amal, Mohammad Ikhlasul Anak Agung Gede Sugianthara Ani Rusilowati Asih, Nur Fitri Asmaul Husna Azizah Mutiarani Azizah Zhafirah Badrul Munir, Badrul Baiti, Upik Nur Bambang Subali Budi Astuti Budi Astuti Candra Dewi Cholis, Muhammad Ridwan Nur Darsono, Teguh Didik Aryanto Didik Aryanto Durrotun Nafisah Durrotun Nafisah Dwi Indah Lestari DWI YULIANTI Dyah Rini Indriyanti Edi, Sukiswo Supeni Edy Cahyono Effendy, Suhardi Ellianawati, Ellianawati Etik Irawati Fariyya, Dewi Raokhil Iklima Fatmala, Rita Iva Firdhosiyah, Siti Gelu, Afrianus Givarin, Delvananta Hadi Susanto Hammam, Hammam Helvi Rumiana Henny Indah Pratiwi Hidayah, Rizki Roqissatul Hidayat, Sony Husna Arifah, Husna Ian Yulianti Ian Yulianti, Ian Iis Widya Harmoko, Iis Widya J.Y. Jung K.H. Kim Karimah, Naelatul Khoiru Ainin Nisa Khumaedi - Kim, Kyoo Ho Kukuh Eka Kurniansyah Kurniansyah, Kukuh Eka Laily Nur Azizah Langlang Handayani Leonardy, Joshu Liana, Yeni Rima Luqman Hakim M.I. Amal maimanah, siti Masturi Masturi Mufatihah, Nishfa Mugi Lestari Muhammad Rasyid Ridla, Muhammad Rasyid Munawaroh, Rosyidatul Mutiarani, Azizah Nafisah Irfani Setiasiwi Neratania, Alvina Ngurah Made Dharma Putra Nisa, Narita Ainun Nugroho, Krisna Ardi NUR HAMID Nur Hamid Nurcahya, Mufid Eska Nurmaya, Eka Pakungwati, Intan Fauziyyah Paminto, Joko Prayogo, Defrian Putra, Ngurah Made Darma Putra, Ngurah Made Dharma Putut Marwoto Rachmawati, Sekar Rohim, Ahmad Minanur Rulyaimah, Rulyaimah Rumiana, Helvi S Sulhadi S.H. Lee Salim, Salisa Yumna Setyanugraha, Noval Siti Khodijah Afsas siti maimanah Sugianto - Sugianto Sugianto Sugiyanto - Suharto Linuwih Sujarwata Sujarwata Sulhadi - Sunarno Sunarno Supa’at, Abu Sahmah Mohd Supriyadi Supriyadi Susilo Susilo Sutikno Madnasri Sutikno Sutikno Swastika Ramadhanty Eka Putri Tri Mugirahayu Triwidianingsih, Novita Uding, Risnawati Ukhti Mutia Munifatuzzahroh Ulpha, Ramadhani Andrawina Upik Nurbaiti Utomo, Galih R. Utomo, Galih Ridho Utomo W. P, Wasi Sakti Wintribrata, Bunaya Hanif Yeni Rima Liana Yuliana Yuliana Zhafirah, Azizah