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Heru Susanto
Department Of Chemical Engineering, Faculty Of Engineering, Universitas Diponegoro, Jl. Prof. Soedharto SH, Tembalang, Semarang 50275, Indonesia
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Journal : Jurnal Teori dan Aplikasi Fisika

 1 
Porous Si (111) Fabrication Using Electrochemical Anodization: Effects of Electrode Distance and Current Density Risa Suryana; Fauzi Ahmad Bogas; Kuwat Triyana; Khairurrijal Khairurrijal; Heru Susanto
Jurnal Teori dan Aplikasi Fisika Vol 9, No 1 (2021): Jurnal Teori dan Aplikasi Fisika
Publisher : Universitas Lampung

Show Abstract | Download Original | Original Source | Check in Google Scholar | DOI: 10.23960/jtaf.v9i1.2705

Abstract

Porous silicon (PSi) has developed for many applications such as gas and humidity sensors. Various methods are available to fabricate PSi, and electrochemical anodization is common due to low cost and easy use. Current density, etching/anodization time, type of etching solution, and electrode distance are the parameters determining resulting pores. The substrate used n-type silicon wafer with (111)-orientation and resistivity of 1.5-4.5 Ω.cm with a size of 1.5×1 cm2. The cleaning process of the samples employed the RCA cleaning procedure. Conductive contacts required for the electrochemical anodization were aluminum on the samples. The electrodes were the Si sample acting as anode and platinum (Pt) electrode as a cathode. The etching solution using a mixture of HF (40%) and ethanol (99%) with a 1:1 ratio. The electrode distance was 1.5, 2.0, and 2.5 cm. The current density for each electrode distance was 10, 30, and 50 mA/cm2 with an anodization time of 30 min. SEM and UV-Vis characterizations were applied to obtain surface morphology and reflectance, respectively. For all samples, the reflectance of PSi was lower than the reflectance of the original silicon surface (no pores). This condition indicates that the PSi is suitable as an anti-reflective layer in a solar cell. However, the PSi of reflectance curves has irregular shapes as a function of wavelength for different electrode distance and the current density. The SEM images confirmed that the pores formed on the silicon surface were inhomogeneous. The pore size decreased with the increase of the electrode distance while it increased as the increase of the current density. There was a correlation between pores size and reflectance at specific wavelength numbers.
Co-Authors . Widayat Abdul Ghofur Abu Rokhmad Addina Nur Adi Darmawan Adjie, Firman Tri Agus Nur Cahyo Agus Nurawan Agustina Kumala Dewi Agustina Kumala Dewi Sholihah Anny Sulaswatty, Anny Apriliana, Pamella Aprilina Purbasari Ariestya Meta Devi Ariestya Meta Devi Arsita, Tiara Seno Asteria Apriliani Susanto Audityo, Muhammad Shelviano Aulia Ainis Lisa Ayuningrum, Denandha Putri Azzahra, Aurum B Budiyono Badrus Zaman Bakti Jos Bambang Cahyono Bambang Pramudono Basituasi Baene Belia Alfiko Berkah Fajar Burhanudin Burhanudin Desiriani, Ria Dian Histifarina Dini Karunia Sari Dudi Hidayat Dwi Titik Apriyanti Dyah Hesti Wardhani Erdi Guna Utama Eti Sunarsih Eva Purwanti, Eva Fajar Wulandari Fajar Wulandari Faleh Setia Budi Fauzi Ahmad Bogas Fekri Pratama Filardli, Abdullah Malik Islam Firda, Nur Firdausi Husrin Fitri Fitri Gonzales, Ralph Rolly Gricela, Sara Gunawan Gunawan Gunta Wirawan Hamdani, Kiki Kusyaeri Handaja, Suka Hanifa Zakiyatul Urbach Heny Kusumayanti Hermawan Hermawan Hermawan Hesti Rahayu I G. Wenten I Nyoman Widiasa I Nyoman Widiasa Insan Suwanto Insan Suwanto irul, Khairullah irul Joddy Arya Laksmono khabibi Khabibi Khairurrijal Khairurrijal Kiki Kusyaeri Hamdani Kuwat Triyana Leonel Adrian Triskanto lois_denissa, Lois Denissa Lulluil Mahsunnah Lulluil Mahsunnah Luqman Buchori Maharani, Nesti Dwi Mamlukhah, Mamlukhah Mansyur Marga Dharma Prayoga Marta Chandra Anikke Putri Meindy Catur Risqiputra Muhammad Cholid Djunaidi Muhammad Luqman Bukhori Muhammad Rafly Pramudya Nagoro, Ignatius Henry Adi Ngadiwiyana M.Si. S.Si. Nita Aryanti Nor Basid Adiwibawa Prasetya Novery Lysbetti Novi Syafa’atun Novintan Elistya Nur Firdausi Husrin Nur Mufarokhah Nur Rokhati Nurcahyo, Agus Nurcahyo, Agus Nurhafifah, Meilina Nursyamsu Nursyamsu Nursyamsu Nursyamsu Olivedia Justin Wijaya Oppie, Oppie Pardoyo Pardoyo Pertiwi Andarani Prasetiya, Hafiizh Qomariah Qomariah Rahmania, Yusi Luluk Ratnadewi, Dwijani Rika Wahyuni Rika Wahyuni Risa Suryana Rosmaiyadi Satrio Kuntolaksono Serlina Adelia Setiawan, Arief Ameir Rahman Siahaan, Samuel Ezra Sima, Sima Siswo Sumardiono Sriatun Sriatun Susan Neni Triani Tamara Cindy Samsita Rani Titik Istirokhatun Tri Martini Tutuk Djoko Kusworo Umi Baroroh Lili Utami Utama, Erdi Guna Wawan Wahyudin Wibowo, F Mukti Widiyanto, Edhi Wiloso, Edi Iswanto Wishnu Wijaya Yanuar Ariyanto Yanuardi Raharjo, Yanuardi Yoga Prasetya Zetli, Sri Zulfahita, Zulfahita