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Journal : Jurnal Matematika

Penumbuhan Lapisan Tipis mc-Si:H Tipe-P dengan Metode HW-PECVD untuk Aplikasi Sel Surya Jasruddin Daud Malago; Abdul Haris; Helmi Helmi
Jurnal Matematika & Sains Vol 14, No 1 (2009)
Publisher : Institut Teknologi Bandung

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Abstract

Thin film of microcrystal silicon hydrogenated (μC-Si:H) p-type has been successfully grown in a hot-wire plasma enhanced chemical vapor deposition (HW-PECVD) by using silane gas (SiH4) and diborane (B2H6) diluted in 10% H2 respectively as gas resources. The resulted thin film have optical band gap decreased from 1.88 eV to 1.50 eV as the dopant concentration increased from 0.50% to 0.20% on filament voltage of 4.5 volt and RF power of 100 watt. Dark and photo conductivities of the film were found significantly high, in the order of 10-8-10-6 Scm-1 and 10-5-10-3 Scm-1 respectively. The conductivity is two order higher than thin film a-Si:H p-type grown using PECVD technique without hot-wire. It is concluded that the thin film produced in this study is suitable for solar cell application and other microelectronic devices
Co-Authors A. A, Arie A. Momang Yusuf Abdul Haris Adi Prasetyo Agus Susanto Ahmad Saban ahmad yani Al Irsyad Anak Agung Gede Sugianthara Andi Asmawati Azis Andika Isma Anggraeni, Rayi Putri Arizka Asmita Ashari, Hilda Asma Darmawan, Fitrah Asmita, Arizka Asnaeni Ansar Ayu Hardianti Pratiwi Bakri, Hasrul Butuni, Syarif Darmawan, Fitrah Asma Daud Mahande, Ridwan Della Fadhilatunisa Eko Hadi Sujiono Fatimah A. Noor Fatimah Arofiati Noor Fauziah Fitrah Asma Darmawan Haeruddin, Hasriani Hafsah Hafsah Hari Triwibowo Hariansah, Agusmin Harlina Harlina Harpina, Harpina Hasan, Nurhikmah Helmi Helmi Heri Rahmat Suryadi Hi Panu, Rasmi Hidayah Quraisy, Hidayah Humairah Mustaqim Asma Husain Husain Ida Ayu Putu Sri Widnyani Irmawati Amir Jasmin Daud, Jasmin Jasmin, Jasmin Kaharuddin Arafah Khaeruddin, Khaeruddin Kurniati Abidin Kurniati Abidin, Kurniati Labusab, Labusab M. A. Martawijaya Mappangara, Surianto MARIA BINTANG Masni Masni Muh. Saleh Muhammad Arsyad Muhammad Ayat Hidayat Muris Muris Musgamy, Hijrah K. Mutahharah Hasyim, Mutahharah Nasib Nasir Nasir Nasrul Ihsan Noviyanti Noviyanti, Noviyanti Nur Afrianah Nur Igawati Nurafni Oktaviyah Nurhaisa Nurhaisa Oktaviana Beferly Mapau Oky Nur Pratiwi Johansyah P, Adi P, Pariabti Pariabti Palloan Pariabti, Palloan Rabiah Rabiah Resky Irfanita Richard Richard Ridwan Daud Mahande Riskawati Riskawati, Riskawati Saragih, Rino Wijatmiko Setialaksana, Wirawan - Subaer - Subaer Subaer Subaer Subaer Sukmawati Sukmawati Sulistiawaty Sulistiawaty Syamsul Arifin Taqwin, Muhammad Toto Winata Triwibowo, Hari Vistarani Arini Tiwow Wahyu Hidayat Zulfikar Putra Zulfikar, Muh. Ihsan