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All Journal RADIASI: Jurnal Berkala Pendidikan Fisika MEDIA LITBANG SULTENG Media Eksakta Jurnal Kreatif Tadulako Online MAGISTRA: Jurnal Keguruan dan Ilmu Pendidikan Jurnal Mirai Management Jurnal Penelitian Pendidikan IPA (JPPIPA) Jurnal Ilmiah Pendidikan Fisika JPF : JURNAL PENDIDIKAN FISIKA MAGISTRA: Jurnal Keguruan dan Ilmu Pendidikan Jurnal Pengabdian kepada Masyarakat Nusantara Jurnal Riset Pendidikan MIPA Mattawang: Jurnal Pengabdian Masyarakat Media Eksakta Jurnal Pengabdian kepada Masyarakat Bina Darma Asean Journal of Science and Engineering (AJSE) Jurnal Kreatif Online Jurnal Pendidikan Sains Indonesia (Indonesian Journal of Science Education) Mitra Sains JPFT (Jurnal Pendidikan Fisika Tadulako Online)
Amiruddin Kade
Program Studi Magister Pendidikan Sains Pascasarjana Universitas Tadulako
Agriculture, Biological Sciences & Forestry Humanities Biochemistry, Genetics & Molecular Biology Chemical Engineering, Chemistry & Bioengineering Chemistry Civil Engineering, Building, Construction & Architecture Computer Science & IT Decision Sciences, Operations Research & Management Earth & Planetary Sciences Economics, Econometrics & Finance Education Electrical & Electronics Engineering Energy Engineering Languange, Linguistic, Communication & Media Materials Science & Nanotechnology Mathematics Physics Public Health Social Sciences Other

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Journal : Media Eksakta

 1 
Optimasi Parameter Tekanan pada Penumbuhan Lapisan Tipis Silikon Amorf Terhidrogenasi dengan Sistem Hot Wire PECVD Syamsu Syamsu; Amiruddin Kade; Haeruddin Haeruddin
Media Eksakta Vol 5, No 2 (2009)
Publisher : Media Eksakta

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Abstract

The HW-PECVD system was then applied to grow a-Si:H thin films on corning glass 7059 by using 10% silane (SiH4) gas diluted in hydrogen (H2) as gas source. By optimization of deposition presure, a better quality a-Si:H thin films with dark conductivities is relative high (4.23x10-9 S/cm). The deposition rate and the optical band gap of the a-Si:H thin film were 0.68 Å/s and 1.98 eV. These results showed that by using HW-PECVD system, the optical properties was successfully increased without deteriorating in the electrical properties.
Co-Authors , Darsikin , Darsikin Abd. Syukur, Muh. Syarif S. Abdul Kamaruddin Achmad Ramadhan Afriani, Rifka Ainun Sampede Alamsyah - Albar Rabak Pabianan Amalia, Maryam Amiruddin Hatibe Amran Rede Anugrah, Sri Ayu Asep Mahpudz Az’zahra, N. F. Bahri, Syamsul Cecep Kusmana Darsikin Darsikin Darsikin Darsikin Farmawati Farmawati Fatmawati Fatmawati Fihrin Fihrin H. Fihrin, H. Haeruddin Haeruddin Haeruddin, Haeruddin Harudin Haerudin Hayun Ahmadong Hendrik Arung Lamba Husain, Sadang Husni, Hiqmatiar I Komang Werdhiana I Nyoman Setiartawan I Wayan Darmadi Imam Muslim, Imam Indrawati Sambow Ismail Ismail Jamaluddin Jamaluddin Jusman Mansyur Kadir, Mutmainah Kaipal, Kaipal Kamaluddin Kamaluddin Kamaluddin Kamaluddin karmila karmila Ketut Alit Adi Untara Khaerul Hidayat Khair, Fathul Khuzaimah, Andi Ulfah Ladupi, Titin Sumarlin Lestari Taruk Datu Lestari, Putri Dian Lilies N. Tangge Lismawati Nangga Maliada, Nurfitra Marungkil Pasaribu Miftah Miftah Miftah Miftah, Miftah Mohammad Jamhari Mubarik Mubarik Mubin, Moh. Fathan Muchlis Djirimu MUHAMMAD ALI Muhammad Jarnawi Muhammad Rivai Muhammad Zaky Munir, Moch. MUSLIMIN Muslimin Muslimin Muslimin Muslimin Mutmainah Kadir N. Laratu, Wahyuni N. Novia, N. Natalia, Vica Nur Cahyani Nur Fadhilatu Rahmah, Nur Fadhilatu Nurfitra Maliada NURHASNAWATI NURHASNAWATI Nurjannah Nurjannah Nurjannah Nurjannah Nurjannah, Nurjannah Nurliza Nurliza Nurmalasari, Resky Nurrahmah Nurrahmah Nurrahmah Nurrahmah Nurrahmah Nurrahmah, Nurrahmah Olis Sumalong Paramitha, Ielda Purnama Ningsih Putrianti, Putrianti Rahma, Nur Ratna, Adi Riski Amelia, Riski Rizka Mentari. Lapangandong, Rizka Mentari. Rudi Santoso, Rudi Rustin R. Saomi S. Supriyadi, S. Said Maula Sani, Nurul Kami Saomi, Rustin R. Saputra, Herdiansyah Setiani, Iin Sri Fatimah Sri Mulyani Sabang Sukarman, Afadil Sulviana Supriyadi Supriyadi Supriyadi Supriyadi, Supriyadi Supriyatman, Supriyatman Sutrisno, Muh. Syamsu Syamsu Syamsu Syamsu Syamsuriwal, Syamsuriwal Tunde, Grace Anasstasia Unggul Wahyono Warindo, Sri Suryany Wherdhiana, I Komang Yusuf Kendek