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Journal : BERKALA FISIKA

Mikrostruktur Semikonduktor GaN di Atas Substrat Silikon Dengan Metode Sol-Gel Sutanto, Heri; Nurhasanah, Iis; Istadi, Istadi; Maryanto, Maryanto; Ambikawati, Wahyu; Marlini, Nofi
BERKALA FISIKA Vol 13, No 2 (2010): Berkala Fisika
Publisher : BERKALA FISIKA

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Abstract

Gallium nitride (GaN) semiconductor thin films have been successfully deposited on Si substrate (004) by sol-gel method. Gel prepared from the crystal gallium-citrate-amines. These crystals formed from a solution containing the ions Ga+3 and citric acid (CA). Gel in place on the substrate and then rotated with a speed of 1100 rpm. The gel layers are obtained and then placed on the programmable furnace. Deposition temperature varied of 800, 900 and 1000oC in a nitrogen gas environment during 2 hour. The crystal quality of GaN thin films have characterized by XRD measurement. The surface morphology and cross section of the films observed by SEM. The film compositions determined by EDX characterization. The results showed that all the GaN thin films on silicon substrate have oriented polycrystalline structure. The crystal quality of GaN film is formed is influenced by the deposition temperature. In a deposition temperature range is used, increasing the deposition temperature can improve the crystal quality of GaN films.   Keywords: GaN Thin Films; Spin-Coating Technique; Silicon Substrate
Co-Authors -, Giyarto . NURHAYATI A.Y. Soegeng Ysh AA Sudharmawan, AA Abdallah, Zachari Achmad Sjaifullah Achmad Subagio Adi Susilo Afif, Moh. Noor Agus R, Abu Hasan Akhmad Jufriadi Alamsyah - Ana, Nova Ari Ananta, Jonny Ari Ani, Emi Dwi Apriliyani, Ita Aris Susanto Ariyanta, Dafid Arni Nur Rahmawati Arni Nur, Rahmawati Atmajaningati, Atmajaningati Avinda Nur Rahmawati Ayu Esteka Sari Azziyah, Azimatun Nor B. Heri Purwanto Baharuddin Paloloang Bambang Piluharto Benny Kurniawan, Benny Bunyamin Bunyamin Cahyaningati, Kinanti Chandrasari, Wahyu Dwi Budi Santoso DWI SUPRIYANTO, DWI Eksi Utari Fadilah, Memik Nor Faisal Amri Fauziah, Muna Fidianingsih, Yeni Fitriyani, Hajrul Frieda, Frieda Frieda, Frieda Gama Kusuma Ghufron Abdullah Gustika Umiyati Hamdani, Deky Heri Sutanto Hermansyah, Agung Herry Purnomo, Bambang I. Istadi Iis Nurhasanah Irnawati, Diyah Istiqomah, Lina Nuril Iwan Taruna Juliejantiningsih, Yovitha Jumanah Jumanah Karniman, Tegoeh S. Karyanti Karyanti, Karyanti Khafidin, Mukhamad Khotimah, Widia Khusnul Kinanti Cahyaningati Kristiani, Bibiana Kristianto, Tito Bobby Kurniatin, Yuni Laksmana, Gustav Tifa Listyaning Sumardiyani Maryanti Maryanti Maryati Maryati Masahid, Ardiyan Dwi Masahid, Ardiyan Dwi Ma’mun, Saepul Muda Setia Hamid, Muda Setia Muhammad Hendrasto Muhdi Muhdi Mulyadi Mulyadi Mundrikah, Siti Murtadlo, Khusnull Murtopo, Bahrun Ali Muzakar, Kahar Ngasbun Egar Nofi Marlini Nor Khoiriyah Nugraha Yuwana Nugroho Setya Budi Nur Izzah Az-zahra Nurhayati Nurhayati Nurhayati Nurhayati Nuriyawati, Nuriyawati Nurkolis Nurkolis, Nurkolis Nurrohman, Moh. Nurud Diniyah Okta Meilawaty Philips, Philips Prasetyo, Agung Slamet Purwanti, Yuli Purwosautro, Supriyono Puspita Sari Qodriyah, Khodijatul Rahayu Lestari Rahmatillah, Alda Novita Rika Tafrikhah Rinawati, Atim Rizki Fatimah, Ana Rusdiah, Nadira Safitri, Wahyuni Saifudin Saifudin Salsabela, Ica Sapto Budoyo Sari, Denni Puspita Sari, Wahyu Titi Septianingrum, Wahyu Dwi Singgih Setyono Siti Fatimah Sofiana, Nur Mei Laidatul Solihin, Dadin Sri Suneki Suara, Mahyar Suganda Girsang, Abba Sukma, Ating Sulistyorini, Emmelia Maria Sumasno Hadi Sumiati Sumiati Supardi Supardi Supriyono Purwosaputro Surya, Tiara Lilis Tegar, Tomy Thelma, Chanda Chansa Tri Ismu Pujiyanto Triadi, Irwan Trisnowati, Indi Depi Wahyu Ambikawati Wardhani, Sayekti Putri Waryanto, Waryanto Wibawani, Esti Wibisana, Muh. Isna Nurdin Widya Kusumaningsih Windiasari, Kikik Wiwik Siti Windrati Wiwik Siti Windrati Wuryandoko, Santoso Yayat Suharyat Yhulia Praptiningsih Yovitha Yuliejantiningsih, Yovitha Ysh, AY Soegeng Yuli Witono