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Journal : TELKOMNIKA (Telecommunication Computing Electronics and Control)

OFET Preparation by Lithography and Thin Film Depositions Process Sujarwata Sujarwata; Fianti Fianti; Langlang Handayani; Aji Purwinarko; Susilo Susilo
TELKOMNIKA (Telecommunication Computing Electronics and Control) Vol 16, No 1: February 2018
Publisher : Universitas Ahmad Dahlan

Show Abstract | Download Original | Original Source | Check in Google Scholar | DOI: 10.12928/telkomnika.v16i1.6544

Abstract

The length of the channel OFET based thin film is determined during preparation takes place using the technique of lithography and mask during the metal deposition process. The lithography technique is the basic process steps in the manufacture of semiconductor devices. Lithography is the process of moving geometric shapes mask pattern to a thin film of material that is sensitive to light. The pattern of geometric shapes on a mask has specifications, as follows: long-distance source and drain channels varied, i.e. 100 μm, the width of the source and drain are made permanent. Bottom contact OFET structure has been created using a combination of lithography and thin film deposition processes.
Co-Authors Abadi, Surjo Abas, Imelda Hermilinda Abdullah, Sahami Achmad Husen Afrian, Zain Agung Purwanto Agus Suman Ahada, Ichi Ahmad Ali Aisyah Aisyah Aji Purwinarko, Aji Al Muizzuddin Fazaalloh, Al Muizzuddin Alamsyah, Mashudi Alim, Alimun Nasrun A. Hi Aloysius Hardoko Alvian, Alvian Alvian, Alvian Amalia, Mega Putri Rizky AMINULLAH, BRILLIAN AKBAR Amirullah, Gufron Amran Rasli, Amran Andi Fadllan Andreas Priyono Budi Prasetyo Ani Rusilowati Anita Anita Anjar Kusuma, Febra Anthon Efani Arfiansyah, Ligi Putra ARI SETIAWAN Aridah, Aridah Arifin, Syaiful Aryani, Nila Prasetya Asfi Manzilati Asrul Asrul Astri Oktaviana Mujiarti, Astri Oktaviana Aulia, Lisa Nur Axellina Muara Setyanti, Axellina Muara Azainil Azainil Azzahra, Annisa Salsabila Babu, R. Udhaya Mohan Badar, Muhammad Badawi, Agil Bagus Putra Setiawan Bambang Subali Bambang Widodo Bambang Widodo, Bambang Widodo Beny, Frederik Beny Silamba Benyamin Hernan Cresvo Hutasoit Berchah Pitoewas Bibit Suhatmady Budhi Akbar, Budhi Budi Prayitno Camalia, Fayeza Candra Fajri Ananda D Martina, D D.J. Pratiwi, D.J. Dameria Sinaga Daniel Tarigan Darmah, Aridah Darmawan, I Gusti Ngurah Defwaldi, Defwaldi Desmilianti, Helvika Destri Zadia Arini Devanto Shasta Pratomo Dewi Ayu Nawang Dewi, Adelina Ryan Candra Dewi, Dewi lestari Diana Vivanti Sigit Didimus Tanah Boleng Ditasona, Candra Driptufany, Dwi Marsiska Dudy D. Wijaya, Dudy Dwi Arini Dyah Sunggingwati Edi Kurniawan Ellianawati, Ellianawati Erlyn Yuniashri Erma Mexcorry Sumbayak Erniyanti Erniyanti Etin Diah Permanasari Febra Anjar Kusuma Fianti Fianti, Fianti Fikri, Saiyidinal Finuliyah, Firdaus Fitriadi, Ahmad Fitroh, Ummi Nuzulul G. B. Suparta Giry Marhento Hadi Susanto Hanifa, Nur Isnaini Hardiyanto, Wahyu Hartono Hartono Hartono, Rio Cahyo Hasbi Iskandar Hendrikus Male, Hendrikus Henita Rahmayanti Hermagustiana, Istanti Hermagustiana, Istanti Hilma Harmen Ian Yulianti, Ian Ilmi Zajuli Ichsan Ilmi, Syaripa Nurul Ilmi, Syaripa Nurul Irwandani Irwandani Isa Akhlis Iwan Setiawan Jaino Jaino Joni Efendi, Joni Jumriah, Jumriah Kalukar, Ventje Kalukar, Ventje Jany Kartika, Nur Helida Khairiyah, Ayu Khairunnisa, Nabila Khusnul Ashar Kristina, Nugra Heni Kurniana, Kurniana Kusminarto Kusminarto Kusumastuti, Anisa Langlang Handayani Limbong, Efendi Limbong, Effendi Lisa Nur Aulia Lisdiana Lisdiana M. Firmansyah Madnasri, Sutikno Maesaroh, Dwi Titi Mahardika Prasetyo Aji Maria Teodora Ping, Maria Teodora Marlina Ekawaty Masswaet, Elsje Theodora Masturi Masturi Meisella, Reri Suci Melati, Emma Melda Simorangkir, Melda Moh. Khusaini Mosik - Mudrosanto, Iswadi Muhammad Eko Purnomo Muhammad Yusuf Mulyawati, Dita Munif, Azhari Muttaqin, Rodhotul Nempung, Judo Ignatius Nina Queena HP Nisyah, Khairun Nita Nita Novita, Mery Nurhayati, Yetty Oktaviani, Suci P.A. Mahardika, P.A. Pabika, Obet Paluruan, William Pardomuan, Remon Patang, Nurfadilah A. Pramitasari, Ratih Pudjihardjo, Pudjihardjo Putra, Ngurah Made Dharma Putri Sherlyana, Ninda Putri, Izharina Tania Putu Mahardika Adi Saputra Putut Marwoto R Aryawijayanti, R Rachmawati, Yunita Rahayu Novita Rahayu, Famala Eka Sanhadi Rahman, Md. Mehadi Rajagukguk, Anita Carolina Ratu Pratiwi, Fadhila Renwarin, Arlen Rijamil, Safira Amru Rini Prastiwi Rini Setyowati, Dea Riris Nurindriani Dwi Meiatun, Riris Nurindriani Rosdiana Rosdiana Rudi Setiawan Sabeilai, Jilva Krisye Saiful Ridlo Salman Aji Saputro, Agung Kuntoro Sari Ayu Wulandari Sari, Dwi Nikita Sarwo Edi Wibowo, Sarwo Edi Satyawati Surya, Satyawati Septiano, Alvin Fachrully Setiawan, Rendy Setiyani, Ade Irma Setyaningsih, Maryanti Setyaningsih, Natalia Erna Setyanti, Acellina Muara Setyo Tri Wahyudi Sibuea, Novli Sigit Saptono Silvi Asna Prestianawati Sitinjak, Natanael Sitompul, Adnan Nirwanda Situmorang, Ghita Dea Fany Situmorang, Martua Rizal Sri Wahyuni Suciatia, Rizkia Sudarmin Sudarmin Sugeng, Santoso Sujarwata Sujarwata Sunardi Sunardi Sunarno Sunarno Supriyadi Supriyadi Suryaningsih, Angelia Rantya Apriliawati Sutikno Sutikno Sutoyo, Slamet Sutoyo, Slamet Tahir, Herlina Tara Marza Citra Dewi Tarukan, Vincetius Yulianis Tri Suminar Tulak, Jeremi Tombi Layuk Utama, Muhamad Adji Rahardian Vika Hutaria W.S. Budi Wahyu Setia Budi Warman Warman Warman, Dira Muvianti Wedyanto Kuntjoro Weningtyas Parama Iswari, Weningtyas Parama Wicesa, Nayaka Artha Widyatmike Gede Mulawarman Winarto, Oetami P. Yohannes Sardjono Yuni Utami Asih, Yuni Utami Yunita Sari Yusak Hudiyono, Yusak